We investigate the design and performance of thin-film micro thermoelectric generators (µTEGs) using human body heat for wearable device applications, in which various module structures using different thermal-isolations are examined. A transverse type of µTEG suitable for a thin-film thermopile is employed for the modules. The thermal and electrical insulation of the interspace between the hot and cold plates of the modules is an important factor to determine the output power of the µTEGs. A module using vacuum thermal-isolation gives the performance limit of the µTEGs. On the other hand, an easy-to-fabricate insulator-based thermal-isolation severely degrades the performance. A new module structure using insulator/vacuum-hybrid thermal-isolation also has a device-process-friendly structure and in addition can exhibit high output power close to the performance limit achieved by the vacuum thermal-isolation module, which would be adaptable to the power source of wearable devices for internet-of-humans.
Design optimization and performance of a micro thermoelectric generator (μTEG) using human body heat are investigated. A newly introduced thin-film π-type μTEG module structure using vacuum/insulator-hybrid thermal isolation with the convex-shape hot plate is useful to achieve a high thermal resistance of the module and also to suppress the unwanted heat flow passing through the supportive wall structure for the vacuum isolation. The optimum design of this μTEG module can exhibit sufficiently high output power suitable for a power source of self-powered wearable devices.
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