Microwave-assisted atmospheric pressure plasma polymerization is presented. A system with a re-entrant microwave cavity realizes simple matching, stable plasma, and free space under the orifice of plasma steam. Hexamethyldisiloxane is employed as a monomer, while argon is used as a carrier gas. The effective area of the hydrophobic coating film used corresponds to a circle of 20 mm diameter and the deposition rate considered is 5 nm/min. Matrix-assisted laser desorption/ionization time-of-flight mass spectroscopy shows that the coating film has a large molecular weight (>200 kDa), suggesting that a high-crosslinking and three-dimensional polymer matrix is formed and microwave-assisted atmospheric pressure plasma polymerization is fulfilled.
The deposition and characterization of nitrogen-rich coating films using atmospheric-pressure plasma generated with a re-entrant cylindrical microwave cavity is presented. This system enables simple matching, stable plasma, and free space under the orifice of plasma steam. Allylamine and acetonitrile are employed as monomers, whereas argon is used as the carrier gas. The effective area of the hydrophilic coating film is 55 mm in diameter and the deposition rate is 10 nm min −1 . X-ray photoelectron spectroscopy measurements show that the surfaces of these films contain a high concentration of nitrogen atoms and primary amine groups. Matrix-assisted laser desorption/ionization time-of-flight mass spectrometry shows that the coating films have a large molecular weight (>200 kDa). The surface morphology is very flat (ca. 1 nm). The experimental results indicate that a highly cross-linked three-dimensional polymer matrix is formed and atmosphericpressure plasma deposition is successfully achieved.
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