The traditional three-dimensional measurement system based on linear-structured light usually involves mechanical scanning platforms to perform the linear scanning, which make the structure of the system huge and complicated. The emergence of the galvanometric laser scanner solves the problem by using a galvanometer to replace the mechanical scanning platform. The employment of the galvanometer can improve the speed of scanning and simplify the structure of the system. However, there are few approaches available to calibrate this kind of system. In this paper, a high-precision calibration method is proposed to calibrate the galvanometric laser scanning three-dimensional measurement system. A precision motorized linear stage and a planar target are applied in this method. The planar target is used for the camera calibration based on Zhang's method and the precision motorized linear stage for the laser plane calibration. The validity and accuracy of this method are evaluated by scanning the standard component. The experiments conducted suggest that the proposed method is valid and accurate for the calibration of the galvanometric laser scanning system.
We propose an even-/odd-synthesis method for the elimination of additional aberration caused by misalignment or environmental vibration during the calibration of a Fizeau interferometer reference surface (RS). The odd and even parts of an RS can be obtained, because surface errors could be divided into rotationally symmetric and nonrotationally symmetric terms. We then propose a least-squares algorithm with a dual-objective optimization function for calibration of the measurement results at the confocal position. Finally, a complete RS can be eventually obtained by synthesizing the odd and even parts of the RS. It has been verified through experiments that the measurement repeatability of the PV value is better than 0.003λ, and the root-mean-square value is better than 0.0003λ.
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