In this paper, the design of the microactuator and We describe the design and performance of a microactuator the principle of operation are described, followed by some with six degrees of freedom (DOF). The six DOF motion is experimental results. realized by using six piezo elements and three electromagnets. The microactuator is similar to the Stewart-platform which realizes a small linear and rotational displacement. We utilize 2. DESIGN the principle of an inchworm which realizes a three DOF large
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