In this paper we report for the first time the design, fabrication and characterization of an optically transparent electrode array for micro-electrocorticography. We present a 49-channel μECoG array with an electrode pitch of 800 μm and a 16-channel linear μECoG array with an electrode pitch of 200 μm. The backing material was Parylene C. Transparent, sputtered indium tin oxide (ITO) was used in conjunction with e-beam evaporated gold to fabricate the electrodes. We provide electrochemical impedance characterization and light transmission data for the fabricated devices.
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