The generation method of sub-millimeter sized plasma was developed through controlling the electrical discharge in the range from glow to arc discharge with use of the experimental torch device and the newly designed high-voltage power source. The electrical discharge was established between a cathode of the electrolytic polished tungsten electrode and an anode of stainless steel sheet. Features of the thermal materials processing by micro-discharge were experimentally investigated. It is shown that the power density of micro-discharge reaches higher than 10 9 W/m 2 and sub-millimeter sized melt spot can be obtained at the surface of anode metal.
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