Multi-walled carbon nanotubes (CNTs) were synthesized directly on stainless steel film thermally deposited on an alumina plate. To activate the growth of CNTs, the stainless steel film was reduced in H 2 stream without oxidation step. The electrical resistivity of the CNT film synthesized by this way turned to be 1/190 of CNT film synthesized by a conventional way using catalyst preparation method with magnetron sputtering. Dielectrophoretic (DEP) particle capture was demonstrated using the patterned CNT film synthesized on stainless steel film, and it was observed that carbon nanohorns (CNHs) dispersed with Pd nanoparticles (Pd-CNHs) and Pd-Au alloy nanoparticles (Pd/Au-CNHs) were captured at the CNT electrodes due to the high electric field strength there. In this DEP capture, Pd-CNHs were enriched in the present condition. The temperature to deposit stainless steel film and the influence of oxidation step were also investigated for the growth of CNTs. V
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