Surface modification of carbon fiber by cold plasma of tetrafluoromethane was investigated.PAN-based and pitch-based carbon fibers were used.Plasma treatment was carried out by high-frequency discharge in tetrafluoromethane.The surface of carbon fiber was modified to be hydrophobic by treatment. The carbon fiber underwent heat-treatment or immersion in water, after which stability of the fluorine introduced was examined by measuring the contact angle with water, fluorine content, and estimating F/C in ESCA spectra.The results revealed the following three types of the fluorine introduced by plasma treatment: (1) covalent bond type, insoluble in water and stable to heat,(2) layer interstitial type, insoluble in water and unstable to heat, (3) adsorption type, spluble in water and unstable to heat.
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