We have devised a "square micro-four-point probe method" using an independently driven ultrahigh-vacuum four-tip scanning tunneling microscope, and succeeded for the first time to directly measure anisotropic electrical conductance of a single-atomic layer on a solid surface. A quasi-one-dimensional metal of a single-domain Si(111)4 x 1-In had a surface-state conductance along the metallic atom chains (sigma(axially)) to be 7.2(+/-0.6) x 10(-4) S/square at room temperature, which was larger than that in the perpendicular direction (sigma(radially)) by approximately 60 times. The sigma(axially) was consistently interpreted by a Boltzmann equation with the anisotropic surface-state band dispersion, while the sigma(radially) was dominated by a surface-space-charge-layer conductance.

A quasi-one-dimensional metallic Si111-4 1-In surface was investigated by a newly developed temperature-variable microscopic four-point probe method combined with in situ electron diffraction in ultrahigh vacuum. We have succeeded, for the first time, in detecting directly a surface metal-insulator transition around 130 K as a dramatic change of electrical conductivity through the surface states. An energy gap of 300 meV at the low-temperature phase, influences of defects and phase locking between the neighboring charge-density-wave chains were elucidated from the temperature dependence of conductivity.

For in-situ measurements of the local electrical conductivity of well-defined crystal surfaces in ultrahigh vacuum, we have developed two kinds of microscopic four-point probe methods. One involves a "four-tip STM prober," in which four independently driven tips of a scanning tunneling microscope (STM) are used for measurements of four-point probe conductivity. The probe spacing can be changed from 500 nm to 1 mm. The other method involves monolithic micro-four-point probes, fabricated on silicon chips, whose probe spacing is fixed around several µm. These probes are installed in scanningelectron-microscopy/electron-diffraction chambers, in which the structures of sample surfaces and probe positions are observed in situ. The probes can be positioned precisely on aimed areas on the sample with the aid of piezoactuators. By the use of these machines, the surface sensitivity in conductivity measurements has been greatly enhanced compared with the macroscopic four-point probe method. Then the conduction through the topmost atomic layers (surface-state conductivity) and the influence of atomic steps on conductivity can be directly measured.