The trend towards minimization in ultralarge-scale integration (ULSI) fabrication requires an increasingly precise motion accuracy for an XY-stage in a high-vacuum environment of electron beam (e-beam) systems. Aerostatic bearings allow for an extremely smooth motion, because the slider of the XY-stage is supported by an air film under a noncontact condition. However, such an XY-stage in aerostatic bearings is not easily introduced into the e-beam systems because of the markedly high amount of exhaust gas leaking into a vacuum chamber. In this paper, we describe a newly developed hybrid XY-stage guided by aerostatic bearings equipped with a noncontact seal mechanism for scanning motion and by mechanical rolling guides for stepping motion.
In order to control electric field relaxation at the tips of practical emitters, we found that volcano-structured double-gated field emitter arrays (VDG-FEAs) could be improved by placing the focusing electrode 470 nm below the electron extraction electrode. We demonstrated that this approach enables excellent endurance in terms of focusing potential, and confirmed its superior focusing characteristics. Even under strong focusing operation at a focusing electrode voltage of 5 V, this VDG-FEA maintained the anode current of 1.9 µA, which was 5 times larger than that of the VDG-FEA with the same height of the focusing and electron extraction electrodes.
A large full-thickness defect of the lower lip is difficult to reconstruct. Preservation of eating and speaking functions based on maintenance of oral sphincter and muscle function, sensation, and the oral aperture are the basic aims. It is also important to achieve a good aesthetic appearance. Here, we describe a new procedure using combined bilateral hatchet and nasolabial advancement flaps for a large full-thickness defect of the lower lip. The aim of use of the hatchet flap is to make a natural curve from the mentolabial fold to the mental protuberance using the "dog ear" resulting from suturing medially advanced bilateral hatchet flaps and to preserve a more certain blood supply to the medial edge of the flap. Our results indicate that the procedure using combined bilateral hatchet flaps and nasolabial flaps is useful for a U-shaped large full-thickness defect, with good functional and aesthetic outcomes.
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