The interaction between hydrogen-diluted methane plasma gas and substrate metal has been investigated to evaluate interfacial phenomena in the heteroepitaxial growth and initial-stage growth of diamond by combing chemical vapor deposition and field ion microscopy (CVD–FIM). The interaction with plasma gas was evaluated from the behavior of the Fowler–Nordheim plot and field ion images, after plasma gas was exposed to a tungsten needle specimen (W tip) at methane contents CH4/H2 of 1–3%. The plasma gas–W tip surface interaction was very intensive, and thick carbonaceous layers in the amorphous state were formed with a depth of several tenths atomic layers on the top surface of a W tip. Some condensed carbon clusters consisting of several carbon atoms emerged on the interfacial carbonaceous mixed layers. The energetic carbon atom was very cohesive, and the condensed carbon clusters corresponded to prenucleation or prediamond states prior to bulk diamond growth. The behavior of the field emission characteristics originating from the condensed clusters consisting of carbon atoms was also discussed.
The interaction between hydrogen-diluted methane plasma gas and the substrate metal has been investigated to evaluate diamond nucleation growth and initialˆlm growth by combining chemical-vapor deposition andˆeld-ion microscopy (CVD FIM). After the plasma gas was exposed to a tungsten tip (W tip) at a methane contents of CH 4 /H 2 =1.5, which is generally used in diamondˆlm growth by CVD, the interaction eŠect was evaluated fromˆeld-ion images and the variation ofˆeld enhancement factor b cm-1 in Fowler-Nordheim plots, which is a result of the interaction with the plasma gas. The plasma-W tip surface interactions are very strong, and mixed thick layers are formed on the top surface of the W tip. The growth of carbon clusters consisting of several carbon atoms is also observed. However, it is still unclear whether carbon clusters are the prenucleation states of diamond growth or amorphous states.
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