Mg x Zn 1-x O thin film alloys were formed on Si substrates by a sol-gel method. The percentage of Mg was controlled by the mol ratio in the starting alcoholate sol solution. The structure of films was studied by X-ray diffraction (XRD). The grain morphology and their spatial compositions were measured by scanning electron microscopy (SEM) together with energy dispersive X-ray spectrometry (EDS) analysis. The films were found to be composed of grains of around several ten nanometers in size and different Mg contents. The photoluminescence (PL) shows a bandedge emission with its peak energy changing from 3.3 eV to 3.6 eV for the Mg content of the starting alcoholate solution from 0% to 20%.
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