We developed deep-proton exchanged (DPE) and annealed waveguides in MgO:stoichiometric-LiTaO3 crystal. We performed DPE in pyrophosphoric acid at 230 °C for 20 min and measured mode size and depth dependent on the annealing duration. High-quality planar waveguides of a mode size as large as 20 µm, suitable for electro-optic spatial light modulators for 355 nm UV wavelength, were obtained by annealing for 200 h.
We propose and demonstrate an electrooptic Bragg deflection optical modulator using a periodically poled MgO:s-LiTaO thin crystal for ultraviolet (UV) laser light. This modulator is a building block for implementation of a one-dimensional spatial light modulator, and can be driven by voltage lower than the conventional bulk-type device. The device was constructed by bonding a thin periodically poled MgO:SLT and a robust support plate with gold layers in-between. A thin crystal structure with good surface flatness was obtained. Good performances, which include a diffraction efficiency as high as 97.8% and a high extinction ratio, were accomplished at 355-nm wavelength.Index Terms-Bragg deflection, domain inversion, lithium tantalate, spatial light modulator, ultraviolet (UV) laser.
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