The effects of the “electron shading” charge build-up at the
bottom of holes are investigated using fluorocarbon gas plasma. The
etch rates of the electrically conductive films such as phosphorus-doped
polysilicon at the bottom of the holes change depending on
whether the films are patterned or not. This is caused by the
decrease of the low-energy ions which reach the bottom of the holes
due to positive charging of the underlying layers. Furthermore, the
potential at the bottom of the contact holes is investigated using
metal-nitride-oxide-silicon (MNOS) capacitors. The positive charging
due to the electron shading effect is measured. In order to reduce
the electron shading charge build-up, the pulse-modulated plasma is
investigated. The selectivity to the underlying layer increases upon
using pulse-modulated plasma.
A method for modeling a tacit knowledge has been developed. Tacit knowledge is a type of knowledge that is difficult to describe with words or symbols such as sports techniques, design skills, etc. It is difficult for us to obtain and share this type of knowledge. In this paper, we discuss a new method to create a model of tacit knowledge by showing an example of web site designing. Usually, capable designers can express their intensions precisely through their works. This is to say, appearances of their works reflect their intention. Thus, it is expected that capable designers' tacit knowledge can be extracted from their works. Knowledge of the design was extracted from actual web pages on the Internet. Then, knowledge models were created by utilizing a Bayesian network. The created models were verified by LOOCV technique. The result shows that one of the created models illustrates part of a designers' knowledge accurately.
This is a study on affection of display space for evaluating people's buying-intention. In our last study, it was proved that even participants were not aware, the design of the wallpaper and color temperature of the lighting of the display space affected the intention to purchase the chocolate pieces. We noticed that a few participants who were not used to buy chocolates wondered how to evaluate and took more time to watch chocolates than other participants. Therefore, we hypothesized that they were not so affected by the display space because they seemed to evaluate chocolates more logical than intuitive. In the experiment, we divided participants into two groups based on whether they are interested in chocolates. As a result, we discovered that the display space affected the buying-intention of the participants interested in chocolates; and did not affect the decision of not interested participants.
: This research focused on the design activities, considered as one of the human's Kansei processes. We have examined the effects of constraints on design by cerebral blood flow measurement (using Near-Infrared Spectroscopy: NIRS). Subjects were asked to perform chair design based on a single color restriction (Task S) and multicolor restriction (Task M). After the both tasks were achieved, subjects were asked to answer subjective evaluations concerning both tasks. The differences of the Oxy hemoglobin value accompanying the tasks and subjective evaluations were examined. Result: Comparing Task S (considering only modeling) and Task M (considering modeling and color scheme), two channels showed a higher value, and one channel showed a lower value for Task M. Four channels showed a higher value for the task evaluated as "difficult." Two channels showed a lower value for the task evaluated as "satisfying." A significant difference could not be observed between the tasks evaluated as "pleasant" and as "creative." (p < 0.05) These results suggest that the restrictions and some subjective evaluations of design activity could correlate with, and be observed from cerebral blood flow measurement.
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