Hydrogen adsorption properties of Pd-doped Santa Barbara amorphous No. 15 (Pd-SBA-15) were investigated and the results were compared with pure SBA-15 ones in terms of change of its structure and Pd concentration. Pd-SBA-15 samples were prepared by a hydrothermal reaction, using mixture of PEO20PPO70PEO20 (P123) and tetraethyl orthosilicate (TEOS). For the doping of Pd on SBA-15, PdC2 solution was added into the mixture of P123 and TEOS, and the solution was annealed at 80 degrees C for 2 hours under 800 Torr of hydrogen atmosphere. According to the X-ray diffraction and transmission electron microscope data, Pd-doped SBA-15 samples form a hexagonal array of mesoporous structure with 20-30 nm size of Pd particles. Values of specific surface area decreased from 630 to 414 m2/g as increasing the Pd doping level due to the increasing of the volume density. In fact, the volume density increased from 0.103 to 0.276 g/cc as increasing the mass ratio of PdCl2 to TEOS from 0 to 0.5. For the Pd-doped SBA-15, the amount of adsorbed hydrogen significantly increased from 0.49 to 0.99 wt% as increasing the Pd doping level from 0 to 0.5 demonstrating that Pd doping is an effect method for SBA-1 5 as a potential use of hydrogen storage application.
Herein, we investigated the chemical reactions associated with low-energy electron exposures on an inorganic-organic hybrid thin film system deposited using molecular atomic layer deposition (MALD) for EUV photoresist applications. Using the hybrid thin films consisting of trimethylaluminum (TMA) and hydroquinone (HQ), we determined the critical doses and thickness contrast of the hybrid materials at various electron energies (up to 400 eV). The custom-built in-situ Fourier-Transform Infrared (FTIR) spectroscopy system, equipped with an electron flood gun and gas residual analyzer (RGA), was employed to monitor the chemical changes induced by low-energy electrons in the hybrid thin films. Based on the in-situ FTIR and RGA results, potential chemical reaction mechanisms responsible for the change in solubility of the TMA/HQ material are proposed.
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