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The main luminescent centers in SiO 2 films are the red luminescence R (1.85 eV) of the non-bridging oxygen hole center (NBOHC) and the oxygen deficient center (ODC) with a blue B (2.7 eV) and a UV band (4.4 eV). Implanted hydrogen diminishes the red luminescence but increases the blue and the UV bands. Thus hydrogen passivates the NBOHC and keeps the ODC's in active emission states. A preliminary model of luminescence center transformation is based on radiolytic dissociation and re-association of mobile oxygen and hydrogen at the centers as well as formation of interstitial H 2 , O 2 , and H 2 O molecules.

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