Parameters of a high frequency capacitive discharge in argon in axially symmetric chambers of different geometries are studied in experiments and by means of two-dimensional kinetic modeling by the Particle-in-Cell method. It is demonstrated that a change in the ratio of the areas of the driven and grounded electrodes can substantially increase the ion energy on the electrode practically without disturbing the plasma parameters. Particular attention is paid to studying the self-bias voltage and the ion distribution function on the electrode for gas pressures ranging from 15 to 70 mTorr. The results of self-consistent calculations are in good agreement with experimental data.
In this work we present experimental results concerning electrode sheath and ion flux formation near a concave electrode with the dimension of a cavity comparable to the electrode sheath length. It is shown that the secondary electron emission can play a crucial role in plasma molding over the electrode surface. It is also observed that plasma has a tendency to "self-leakage" in electrode cavities.
IntroductionRadio frequency (rf) and microwave discharges are widely used in plasma technology. In these discharges electric fields produce active particles in plasma and accelerate electrons and ions to the substrate. Charge particle bombardment of the substrate is one of the most important factor in plasma technology [l-31. It affects on particle deposition, atom mobility on the surface and surface chemical reactions. At the same time, measurements of the charged particle flux parameters give an important information about plasma and sheaths properties. As a result, it provide a possibility to design different types of diagnostics which can be useful in research and practical applications. The main goal of the work presented is to measure electron and ion fluxes on electrode in rf and microwave discharges to determine discharge parameters and mechanism of the high frequency field absorption. We designed the secondary electron diagnostic in low pressure capacitive rf discharge and measured sheath voltage waveform and electron density in plasma regon. Also, we established ion flux diagnostic of microwave discharge in magnetic field. We studied an exciting wave polarization influence on flux intensity
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.