Influence of the period value Λ (at different negative potential Ub that supplied during deposition) on phase composition, structure, stress-strain state and hardness of multiperiod coatings ZrNx/MoNx is investigated by using complex methods of validation structural state at combined with microindentation. Formation in layers ZrNx and MoNx the phases with cubic lattice and preferred orientation of crystallites with axis [100] is established. Stress-strain state of compression with increasing Ub is amplified and reaches maximum value (-6.7 GPa) at Λ 20 nm and Ub -110 V. Hardness of coating increases with decreasing Λ from 300 to 20 nm. Coatings that obtained with Λ 20 nm and Ub -110 V have the highest hardness 44 GPa. Relaxation of structural compressive stresses and decreasing hardness is happening at smaller Λ and larger Ub -110 V (as a result of radiation-stimulated forming defect and mixing). Data of computer modeling of defectiveness at atomic level at bombardment of ions that accelerated in field Ub are used to explain the results.
By methods of structural analysis (a precise X-ray diffraction method and raster electron microscopy) in conjunction with tests on physical and mechanical characteristics (hardness, elastic modulus, friction force and friction coefficient) comprehensive studies have been conducted. Such complex researches are the basis for optimization of properties of multiperiod systems TiNx/ZrNx by changing their structural states (structural engineering). The main parameters of changes were: number of layers (n) from 134 to 534 (at total coating thickness of about 10 microns) and magnitude of negative bias potential Ub. Formation of biphasic (TiNx and ZrNx) condition was revealed. On substructural level the most sensitive to Ub is micro-strained state. The growth of micro-strain with an increase numbers of ZrNx layers (at the greatest Ub -200 V) testifies about the determining contribution of irradiation of heavy Zr ions in defect formation at formation of coating. Is established that under optimal technological parameters of receiving of multiperiod TiNx/ZrNx coatings their hardness is in the range 40-50 GPa that corresponds to super hard condition. Dependence of penetration depth of indenter is revealed during testing in a pair of "diamond-multiperiod TiNx/ZrNx coating" and coefficient of friction on the ratio H/E, which characterizes the elasticity of material.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
hi@scite.ai
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.