150 MHz rectangular AT-cut quartz crystal units were prepared by means of photolithography. For the elimination of the effect on a frequency response by the mechanically damaged layer, chemical etching on both sides was employed. Gold evaporated films were used as the electrodes for frequency stability during long-term driving. As a result, crystal units which had excellent frequency stability during long-term driving and low crystal impedance were obtained. Furthermore, a Colpitts crystal oscillator was constructed, and some experimental data are presented.
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