Interfaces and hence electrodes determine the performance of (Ba,Sr)TiO3 (BST) capacitors for ultralarge scale integration dynamic random access memories. Electrode materials forming a rectifying contact on BST drastically reduce the dielectric constant and hence the capacitance and charge storage density of the capacitor, when the dielectric thickness is reduced. This can limit the role of Pt as an electrode material for gigabit dynamic random access memories (DRAM). The conducting oxide, La0.5Sr0.5CoO3 (LSCO) with its perovskite structure, has structural and chemical compatibility with BST. Our results in LSCO/BST/LSCO capacitor show that the mechanism of conduction is not interface limited but predominantly bulk limited. A 75 nm BST film with LSCO electrodes shows a leakage current density of 1×10−7 A/cm2 at 1 V, 85 °C. The dielectric constant at 1 V, 105 Hz is 350, making LSCO a potential contact electrode for DRAM memories.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.