i Commissariat à l'énergie atomique et aux énergies alternatives, DEN Cadarache, France; j Commissariat à l'énergie atomique et aux énergies alternatives,The basic principle of SIMS is that a focused beam of energetic ions (so-called primary ions) is targeted onto the surface of a solid sample. Primary ions dissipate their energy, leading to the sputtering and ionisation of the outmost atoms of the sample surface. The resulting secondary ions are accelerated and transferred to a magnetic analyser.
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