Crystallographic and microstructural studies of BaTiO3 thin films grown on SrTiO3 by laser molecular beam epitaxy J. Vac. Sci. Technol. A 15, 275 (1997); 10.1116/1.580524 BaTiO3 thin films grown on SrTiO3 substrates by a molecular-beam-epitaxy method using oxygen radicals Epitaxial ultrathin films of BaTiO 3 were prepared using molecular beam epitaxy. For the substrate, ͑001͒-oriented SrTiO 3 single crystals were used. Controlling the growth conditions of these films as well as the semiconductor thin films, led to the successful growth of the BaTiO 3 films as single crystals, characterized by x-ray diffraction even in the ultrathin range. The ultrathin BaTiO 3 films are highly c-axis-oriented tetragonal phaselike bulk BaTiO 3 crystals. The tetragonality of the thin film crystals is much larger than bulk crystal's. We also measured the saturated polarization ( Ps͒ of the BaTiO 3 films at temperatures ranging from room temperature to 600°C. The results confirmed again that the films are ferroelectric tetragonal phase crystals. Moreover, they showed that the transition temperature for the ferroelectric-paraelectric phase transition of the films is higher than bulk crystal's.

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Spatial variation of ferroelectric properties in Pb(Zr 0.3 ,Ti 0.7 )O 3 thin films studied by atomic force microscopy

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