Second harmonic generation is investigated in a ZnSe/ZnS0.22Se0.78 waveguide grown by metal organic vapor phase epitaxy on (001) GaAs substrate. Phase matching is achieved by a first order periodic modulation of the nonlinear susceptibility χ(2) within the waveguide structure. The modulation is generated by a focused ion beam implantation technique, resulting in a well confined damage of the crystalline structure. The observed phase matching wavelengths corresponding to various modulation periods between 1.6 and 1.9 μm agree with those predicted by calculations.
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