In this work, we design and demonstrate a compact electron source that combines an integrated silicon nanotip photoemitter with a compact silicon-based electrostatic lens. The lens simultaneously accelerates electrons to 30 keV and focuses the resulting beam to a 0.4 μm (RMS) beam diameter with 62 pm-rad normalized emittance at a distance of 20 mm from the cathode. The compact nature of this lens provides a compelling source for dielectric laser accelerator (DLA) beamlines, ultrafast electron diffraction, or ultrafast electron microscopy. Driven by a 220 fs, 1960 nm pulsed laser beam, electron currents up to 28 electrons/pulse at 100 kHz are demonstrated. The electron bunch length is 540 ± 50 fs for photocurrents of <1 electron/pulse, increasing to 700 ± 80 fs for 28 electrons/pulse, as measured by cross correlation with a 220 fs pulsed laser beam. The maximum 5D peak brightness is measured to be 6.8 × 1013 A/(m2 rad2) at 28 electrons/pulse. These results represent a significant step toward developing practical benchtop-sized linear accelerators based on DLA technology or compact ultrafast electron microscopy and diffraction applications.

Dielectric Laser Acceleration (DLA) achieves the highest gradients among structure-based electron accelerators. The use of dielectrics increases the breakdown field limit, and thus the achievable gradient, by a factor of at least 10 in comparison to metals. Experimental demonstrations of DLA in 2013 led to the Accelerator on a Chip International Program (ACHIP), funded by the Gordon and Betty Moore Foundation. In ACHIP, our main goal is to build an accelerator on a silicon chip, which can accelerate electrons from below 100 keV to above 1 MeV with a gradient of at least 100 MeV/m. For stable acceleration on the chip, magnet-only focusing techniques are insufficient to compensate the strong acceleration defocusing. Thus, spatial harmonic and Alternating Phase Focusing (APF) laser-based focusing techniques have been developed. We have also developed the simplified symplectic tracking code DLAtrack6D, which makes use of the periodicity and applies only one kick per DLA cell, which is calculated by the Fourier coefficient of the synchronous spatial harmonic. Due to coupling, the Fourier coefficients of neighboring cells are not entirely independent and a field flatness optimization (similarly as in multi-cell cavities) needs to be performed. The simulation of the entire accelerator on a chip by a Particle In Cell (PIC) code is possible, but impractical for optimization purposes. Finally, we have also outlined the treatment of wake field effects in attosecond bunches in the grating within DLAtrack6D, where the wake function is computed by an external solver.

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