A sandwiched light-trapping electrode structure, which consists of a capping aluminum-doped ZnO (AZO) layer, dispersed plasmonic Au-nanoparticles (Au-NPs), and a micro-structured transparent conductive substrate, is employed to stabilize and boost the conversion-efficiency of hydrogenated amorphous silicon (a-Si:H) solar cells. The conformal AZO ultrathin layer (5 nm) smoothened the Au-NP-dispersed electrode surface, thereby reducing defects across the AZO/a-Si:H interface and resulting in a high resistance to photo-degradation in the ultraviolet-blue photoresponse band. With the plasmonic light-trapping structure, the cell has a high conversion-efficiency of 10.1% and the photo-degradation is as small as 7%.
We investigate the performance of a single junction amorphous Si (a-Si) and a-Si/a-Si tandem solar cells fabricated with Inductively Coupled Plasma (ICP) deposition technique. The high-density plasma resulting from high dissociation capacity of ICP enables good-quality hydrogenated Si films to be synthesized at low temperatures.High-density ICP also promotes the diffusion of reactive radicals on substrates and forms a-Si:H films with low defect density. We demonstrate single-junction a-Si solar cells and a-Si/a-Si tandem solar cell with a conversion efficiency of 9.6% and 8.8%, respectively. Highly light-soaking stable high-density plasma-fabricated a-Si and a-SiJa-Si solar cells were demonstrated with photo-induced degradation in conversion-efficiency as low as 7% and 5%, respectively.
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