The efficiency and morphology of boron deposition have been investigated in a glow discharge, using a BCl3-H2 mixture. The efficiency of reaction depends on the initial BCl3 concentration and the gas flowrate. The maximum efficiency was 27% at 800° C using an initial BCl3 concentration of between 0.2 and 10 vol. -%. Under these conditions the boron condensed on the caihode as slightly overlapping spiral crystals. The quantity of condensed boron increases linearly with higher initial BCl3 concentration, and thus the reaction should be considered as being first order relative to the BCl3 concentration.
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