The grain size distributions of {11.0} textured Co–Cr–Pt and Co–Cr–Pt–Ta magnetic layers with Cr-alloy underlayers have been investigated by high-resolution transmission electron microscopy. The grain size distribution of the Co–Cr–Pt layer can be best described by the Rosin–Rammlar function. On the other hand, the Co–Cr–Pt–Ta layer is best described by the log–normal function which has a longer tail in the large-grain-size region than the Rosin–Rammlar function has. The size distribution tended to broaden as the average grain size of the magnetic layer decreased.
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