This paper presents a novel design for a high resolution microelectromechanical systems (MEMS) technology based resonant gyroscope using the mode-localization effect in weekly coupled resonators (WCRs) as a mechanism for sensing the input angular rate. The design consists of a single proof mass with two three degree-of-freedom (3-DoF) WCRs systems attached on either side. The MEMS gyroscope is designed according to the microfabrication constraints of the foundry process, silicon-oninsulator multi-user MEMS process (SOIMUMPs). The shift in the resonance frequency values, amplitude ratios of the WCRs, and amplitude ratios difference of two sets due to electrostatic stiffness perturbation, corresponding to the input angular rotation, are discussed as an output metric for the measurement of angular rate. The results show that the amplitude ratio difference as an output metric allows to achieve a linear output response and large dynamic range in comparison to the shift in the amplitude ratio and resonance frequency in 3-DoF WCRs in a single set. The dynamic range and resolution of the MEMS gyroscope in terms of maximum allowed resonators amplitude and noise floor is discussed. The proposed MEMS gyroscope design has a sensitivity of 62830 ppm/°/s based on a difference in the amplitude ratios of resonators in two 3-DoF WCRs systems and a dynamic range of ±100 °/s. The resolution of the MEMS gyroscope is 31.09 × 10 -6 °/s which is significantly higher than existing MEMS gyroscopes and is comparable to traditional bulky ring laser gyroscopes. This high resolution makes the proposed MEMS gyroscope design suitable for use in applications such as earth rotation rate measurement for gyrocompassing and high precision robotics INDEX TERMS Amplitude ratio, Finite-Element-Method (FEM),

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.

PurposeThis paper aims to present an efficient design approach for the micro electromechanical systems (MEMS) accelerometers considering design parameters affecting the long-term reliability of these inertial sensors in comparison to traditional iterative microfabrication and experimental characterization approach. Design/methodology/approachA dual-axis capacitive MEMS accelerometer design is presented considering the microfabrication process constraints of the foundry process. The performance of the MEMS accelerometer is analyzed through finite element method– based simulations considering main design parameters affecting the long-term reliability. The effect of microfabrication process induced residual stress, operating pressure variations in the range of 10 mTorr to atmospheric pressure, thermal variations in the operating temperature range of −40°C to 100°C and impulsive input acceleration at different input frequency values is presented in detail. FindingsThe effect of residual stress is negligible on performance of the MEMS accelerometer due to efficient design of mechanical suspension beams. The effect of operating temperature and pressure variations is negligible on energy loss factor. The thermal strain at high temperature causes the sensing plates to deform out of plane. The input dynamic acceleration range is 34 g at room temperature, which decreases with operating temperature variations. At low frequency input acceleration, the input acts as a quasi-static load, whereas at high frequency, it acts as a dynamic load for the MEMS accelerometer. Originality/valueIn comparison with the traditional MEMS accelerometer design approaches, the proposed design approach focuses on the analysis of critical design parameters that affect the long-term reliability of MEMS accelerometer.

No abstract

No abstract