This paper presents an acceleration-threshold sensor fabricated with
an electroplating technology which can be integrated on top of a pre-processed
CMOS signal processing circuit. The device can be manufactured using a
standard low-cost CMOS production line and then adding the mechanical sensor
elements via a specialized back-end process. This makes the system especially
interesting for automotive applications, such as airbag safety systems or
transportation shock monitoring systems, where smaller size, improved
functionality, high reliability and low costs are important.
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