Slurry flow on the pad surface and its effects on oxide chemical mechanical polishing (CMP) performance were investigated in simulations and experiments. A concentric groove pad and the same pad with radial grooves were used to quantitatively compare the slurry saturation time (SST), material removal rate (MRR), and non-uniformity (NU) in polishing. The monitored coefficient of friction (COF) and its slope were analyzed and used to determine SSTs of 25.52 s for the concentric groove pad and 16.06 s for a certain radial groove pad. These values were well correlated with the simulation prediction, with around 5% error. Both the laminar flow and turbulent flow were included in the sliding mesh model. The back mixing effect, which delays fresh slurry supply, was found in the pressure distribution of the wafer–pad interface.
In this study, a wear test method was proposed to predict the wear life of the CrN layer coated on the surface of the press tools for manufacturing the auto-parts with ultra high strength steel (UHSS) with a tensile strength of 1.5 GPa. The pin-ondisc type wear test was carried out to confirm the feasibility and the reproducibility of the wear amount according to the test conditions such as the normal force, the sliding velocity, and the sliding speed. The test conditions were obtained from the finite element stamping analysis and the wear simulation. With the wear amount from the wear test, a prediction model of the wear depth in the CrN coating layer was proposed according to the test conditions with the design of experiments such as Taguchi method and the response surface method. The derived prediction model was then compared to the result of the Archard wear model, fully describing that the proposed model can effectively predict the wear life of the press tools for the auto-parts with UHSS.
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