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Abstract-Communications interconnects and networks will continue to play a large role in contributing to the global carbon footprint, especially in data center and cloud-computing applications exponential growth in capacity. Key to maximizing the benefits of photonics technology is highly functional, lower power, and large-scale photonics integration. In this paper, we report on the latest advances in the photonic integration technologies used for asynchronous optical packet switching using an example photonic integrated switched optical router, the label switched optical router

High verticality and reduced sidewall deterioration of InP/InGaAsP in Cl 2 / H 2 / Ar inductively coupled plasma etching is demonstrated for a hydrogen dominant gas mixture. Selectivity Ͼ20: 1, an etch rate of 24 nm/s, and a sidewall slope angle of Ͼ89°have been measured for etch depths Ͼ7 m. The Ar flow is minimized to reduce surface etch damage while increased Cl 2 and H 2 gas flow is shown to increase etch rate and selectivity. The high chamber pressure required for plasma ignition causes isotropic etching at the start and creates an undercut beneath the masking layer. A novel ignition scheme using a hydrogen gas "flood" is suggested and results are presented.