Scalable nanomanufacturing enables the commercialization of nanotechnology, particularly in applications such as nanophotonics, silicon photonics, photovoltaics, and biosensing. Nanoimprinting lithography (NIL) was the first scalable process to introduce 3D nanopatterning of polymeric films. Despite efforts to extend NIL’s library of patternable media, imprinting of inorganic semiconductors has been plagued by concomitant generation of crystallography defects during imprinting. Here, we use an electrochemical nanoimprinting process—called Mac-Imprint—for directly patterning electronic-grade silicon with 3D microscale features. It is shown that stamps made of mesoporous metal catalysts allow for imprinting electronic-grade silicon without the concomitant generation of porous silicon damage while introducing mesoscale roughness. Unlike most NIL processes, Mac-Imprint does not rely on plastic deformation, and thus, it allows for replicating hard and brittle materials, such as silicon, from a reusable polymeric mold, which can be manufactured by almost any existing microfabrication technique.
Control of ligament size in nanoporous gold through process inputs in chemical dealloying holds the potential to exploit its size dependent properties in applications in energy and biomedicine. While its morphology evolution is regulated by the kinetics of coarsening, recent studies are focused on the early stage of dealloying (e.g., ∼ 5−42 at. % in residual alloy content) to understand mechanisms of ligament nucleation and its role in altering process−structure relationships. This paper examines this stage in chemical dealloying of nanocrystalline Au 49 Ag 51 thin films and finds that ligaments are nucleated uniformly through its thickness due to the dealloying front rapidly propagating through the thickness of the film. Further, through the establishment of process−structure relationships with large data sets (i.e., 80 samples), this paper quantifies sources of variability that alter the kinetics of ligament growth such as aging of the precursor (e.g., grain growth) and solution evaporation. It is found that ligament diameter is better predicted by the residual silver content rather than by the dealloying time even amidst both effects and independent control of ligament diameter and solid area fraction is demonstrated within a limited window.
This work studies the optical reflectance of nanoporous gold (NPG) thin films of varying pore volume fraction (PVF) synthesized by chemical dealloying of Ag-Au alloy precursors. The fabricated samples are characterized by scanning electron microscopy, and spectral hemispherical reflectance is measured with an integrating sphere. The effective isotropic optical constants of NPG with varying PVF are modeled for the wavelength range from 0.4 to 1.6 μm using the Bruggeman effective medium theory. As the thickness of the NPG thin films is more than ten times larger than the effective penetration depth, the spectral reflectance is simply modeled with the Fresnel coefficients at the interface of air and semi-infinite NPG with different incident angles and polarizations. Consistent with the modeling results, the optical measurement data shows that the spectral normal reflectance of NPG significantly decreases with larger PVF values in the near-infrared regime. On the other hand, the reflectance increases greatly only within visible range at larger oblique angles for transverse-electric polarized waves compared to transverse-magnetic waves. Moreover, the NPG samples demonstrate good thermal stability from room temperature up to 100 °C with little changes in the temperature-dependent spectral hemispherical reflectance.
Nanoporous metal foams have an increasing importance in applications such as chemical catalysis, energy storage, and nanomedicine. This paper examines a simple strategy for controlling the pore volume fraction and pore size of nanoporous films synthesized by dealloying thin-films. By means of controlling the temperature and concentration of nitric acid in dealloying of AgAu thin-films, partially dealloyed AgAu nanoporous films are produced with a high degree of control over the pore size and pore volume fraction. Such capability enables the design of nanoporous metal catalysts materials with desired morphology.
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