Superconducting YBa2Cu3O7−x thin films were obtained under high vacuum (10−5 Torr) on substrates of polycrystalline Al2O3 sapphire, SrTiO3, and Si, having zero resistance at 81, 85, 87, and 79 K, respectively. A N2 laser of 3.5 J cm−2 energy density was used for the evaporation. The substrates were heated by a cw single-mode CO2 laser and the annealing was performed by the same laser in O2 atmosphere. Local planar superconducting regions were obtained by focusing the radiation of the cw CO2 laser upon the films. The films were investigated by scanning electron microscope, x-ray microanalysis, and x-ray diffraction.
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