<div>This paper reports back-end-of-line (BEOL) (process temperature <350°C) compatible vertically stacked indium gallium zinc oxide (IGZO) based multi-bit one-time programmable (OTP) ferroelectric (Fe) thin film transistor (TFT) memory devices with lifelong retention capability for the first time. Further we have evaluated the performance of the IGZO-based OTP Fe-TFT as synaptic devices for monolithic 3D (M3D) inference engine. System level simulation revealed inference accuracy of 97% for MNIST data in MLP neural network with maximum accuracy loss of 1.5% over a period of 10 years without re-training. The proposed M3D inference engine also showed superior energy efficiency and cell area of 95.33 TOPS/W (binary) and 8𝐹2 respectively.</div>
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.