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harvesters that can replace conventional energy sources. [1] Microelectronic devices use small rechargeable or nonrechargeable batteries as their primary source of power. However, these batteries have a limited and uncertain lifetime, have difficulty replacing, and hence maintenance intensive. Energy harvesting devices are becoming an increasingly viable solution and may one day replace conventional batteries in low power applications. [2] Microfluidics analysis is one of the important research fields in MEMS, exhibiting broad market prospects due to characteristics, e.g., flexibility and the ability of rapid thermal transport. [3] Microfluidic devices are remarkably flexible and can be stretched in shape and size, allowing them to convert the deformation of the material into electricity. [4] It makes them capable of integrating the MEMS-based energy harvesters in self-powered sensors [5] located in various environments, such as the human body. [6] Also, microfluidics technology can be used for increasing the performance efficiency of energy harvesters by using as a heat exchanger [7] or embedding in the housing system. [8] Also, MEMS technology, which allows microscale structures to be fabricated inside energy harvesting devices, has enormously improved harvesting methods. It is a microstructure that ensures physical interactions happen in a tiny space so that the size of the harvester can be minimized and energy density can be improved.

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