The thorough investigation has been made to find an optimum condition for the synthesis of the nitrogen-atom endohedral fullerene (N@C60), which contains the atomic nitrogen inside the carbon cage of C60. Using our radio-frequency-plasma apparatus, the condition is realized to maximize the density of nitrogen-molecule ions (N2+) in the plasma under the pressure of 25 Pa and the acceleration substrate bias voltage of -90 V. As a result, the target molecule of N@C60 is produced in relatively high purity (mol concentration ratio of N@C60 to C60) of 0.25%, which is an order of magnitude higher than that reported in the other literatures.
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