is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. Abstract-This paper presents the implementation of a novel vibration amplitude control and resonant frequency tracking for piezoelectric transducers (PTs) and ultrasonic motors (USMs). It is based on a generalization of the vector control method to the PT and the USM, which is explained in the first part. We show that two independent controllers with a similar structure are required: one tracks the resonant frequency and the second controls the amplitude. We then present the implementation into a low-cost digital signal processing controller with a sampling period of 200 µs. Experimental results on a Langevin transducer achieved a time response of 20 ms approximately, and the generality of the method is further demonstrated on a 2-D tactile stimulator at the end of this paper.
Actuation and sensing with electroactive polymers should be a chance for flexible MEMS but their micromachining and integration are still not mature. Some innovative materials and microfabrication processes are still expected. In this paper, a first full elaboration of polymeric microtransducers (MTs) including integration and operation has been described. The fabrication process relies on commercially available poly(3,4-ethyledioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) conductive ink, onto flexible SU-8 photoresist microchip. Batch-fabrication of complex flexible monolithic units comprising individually addressable MTs of different shapes, is demonstrated. The resulting polymeric MTs show both very promising bending actuation and strain sensing properties in open-air. Remarkably, the microfabrication process did not impact the performances compared to material fabricated with laser cutting. This work paves the way for flexible MEMS development for soft microrobotics, microfluidics in medical and spatial applications.
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