The influence of the hybridization exothermic effect on nanomechanical deflections of DNA chips in label-free biodetections is investigated. First, from the related experimental curves, the thermal variation of the biolayer during the linkage of DNA base pairs is estimated by Breslauer's method and the Langmuir adsorption isotherm. Second, the temperature field of the chip is obtained by the lumped parameter model and the classical Fourier's method. Third, the nanomechanical deflection of the chip is predicted by an alternative model for thermoelastic problems of laminated cantilever beams. The effect of a DNA base sequence on thermal deflection of chips is also investigated. In the case of adiabatic conditions, numerical results show that the theoretical predicted value of 1.5 nm to 2 nm deflection is within the scope of the optical-beam-deflection readout system's accuracy.
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