In this paper, for the first time, excimer laser micromachining is applied to create new electrooptical devices called substrate integrated modulators, consisting of new optical and microwave waveguides on LiNbO 3 substrates. The fact of having both optical and microwave waveguides, offers the possibilities to modulate high-frequency optical signal (wavelength of 1.55 μm) by either millimeter or microwave signal (frequency of 60 GHz). Because LiNbO 3 is transparent between 370 nm to 5000 nm, 248 nm KrF excimer laser is one of the best candidates for performing fine micromachining of this material. Cutting the LiNbO 3 wafer, making holes, creating a ridge optical waveguide and fabricating a specific pattern of holes for microwave applications by 248 nm excimer laser are presented in this paper.
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