As semiconductor manufacturing technology is becoming increasingly complex, hundreds of tools and process steps need to be strictly controlled and managed in the production line. The review of past wa@r scrap history has revtaled that one major scrap category was caused by inadvertent human error inducing un-intended change of the recipe setting in production tools. In order to get better production line yield and to assure wafer manufacturing qual&, it is mandatory to prevent such human errors. Consequently, an effective recipe control and management methodology through a preventive system approach is required. At UMC, we have developed a Recipe Control and Management System (RCMS) for this purpose. This paper presents an overview of this RCMS system and management approaches. The latter includes supporting systems such as a recipe change eo-sign system, Job-in-Cancel function, alarm disposition request (ADR), advanced pre-checking scheme on newly releasing a product for mass production, and post auditing reports on RCMS execution performance review. The RCMS and supporting systems together have provided a comprehensive & effective measure on recipe control and management in a preventive and foolproof manner.
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