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This study investigates the electrical performance of amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors with Ga2O3 gate dielectric and applied on deep-ultraviolet phototransistors. To reduce the leakage current, we introduce the SiO2 interlayer dielectric, which effectively reduces the off-current. Under the illumination of 250 nm, the measured responsivity of the device was 3.2 A/W at an applied gate bias of 0 V. The photo-generated carriers were injected into the channel by the applied electric field and Fowler-Nordheim tunneling. A large photocurrent and responsivity can be obtained which is attributed to the high mobility of the a-IGZO channel.

This study investigates the electrical performance of amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) with a Ta2O5 gate dielectric under monochromatic illumination. The relationship between the phototransistor performance and oxygen partial pressure is determined. The oxygen content of the a-IGZO channel significantly affects the electrical and optical characteristics of a-IGZO TFTs. At applied gate biases of 0, 0, and 0.25 V, oxygen partial pressures of 0%, 0.1%, and 0.2% yielded measured device responsivities of 0.23, 0.44, and 4.75 A/W, respectively. Oxygen content can be used to control the mobility of TFTs, which can amplify photocurrent and enhance the responsivity of a-IGZO TFTs with a Ta2O5 gate dielectric.

In this study, we report the growth and characterization of lateral ZnO nanowires (NWs) on ZnO:Ga/glass templates. Using x-ray diffraction and micro-Raman spectroscopy, it was found that crystal quality of the as-grown ZnO NWs is good. It was also found that the average length and average diameter of the laterally grown ZnO NWs were 5 µm and 30 nm, respectively. A vacuum pressure sensor was then fabricated using a single NW bridging across two electrodes. By measuring the current-voltage characteristics of the samples at low pressure, we found that the currents were of 17, 34.28, 57.37 and 96.06 nA for the ZnO NW measured at 1 × 10(-3) Torr, 1 × 10(-4) Torr, 3 × 10(-5) Torr and 5 × 10(-6) Torr, respectively. These values suggest that the laterally grown ZnO NWs prepared in this study are potentially useful for vacuum pressure sensing.