Y-doped Hf-Zr-O (Y-HZO) films have been prepared by chemical solution deposition (CSD). It is shown that good ferroelectric property can be obtained for the Y- HZO film with an Y concentration of 3.2% after 800 oC crystallization annealing at a reduced pressure of 50 Pa. It is also demonstrated that the reduced pressure pre-annealing at temperatures as low as 400 oC is effective to obtain good ferroelectric properties, regardless of the crystallization annealing ambient. This is presumably because the pre-annealing under reduced pressure promotes the formation of nuclei of orthorhombic phase.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.