The nano particle control in the supercritical fluid technology using CO 2 (SCCO 2 ) is extremely essential for SCCO 2 to enter a 300 mmSi-wafer semiconductor industry as a viable technology. In this study, we explored the basic particle removal behavior of SCCO 2 , varying the process recipe of the SCCO 2 operation and the size of nano particles (PSL: polystyrene latex). The SCCO 2 with Methanol as a non-solvent for PSL has indicated that PRE (particle removal efficiency) has the dependency of the nano particle size (weight) and hit the highest level of around 45 % on the smallest PSL (75 nm-dia.) particles. The SCCO 2 with Pyridine as a solvent for PSL has shown that its PRE has a similar tendency as seen on Methanol, but indicates a higher level of around 55 % than that of the SCCO 2 with Methanol.
Generating output characteristics of a EYE-type piezoelectric generator depending on ceramic size and materials of the elastic body were studied. EYE-type piezoelectric-generating device consist of the ceramic was attached between the both elastic body. piezoelectric-generating is that if the tension occurred at both ends of an elastic body, the piezoelectric effect occurs at ceramics through the form change of the elastic body. The structure of this EYE-type generator use various area. than a existing type generator, because the ceramic position of the directly force at does not apply. Resonance and output characteristics of the generator were analyzed by using FEM program. Generators were fabricated on the basis of analyzed results and attached on a frequency controllable vibrator to measure output characteristics. Also, the experimental results were compared with the simulated results. As a result, output characteristics of the generator increased depending on the increase in ceramic thickness. In case of increase in ceramic width, resonance frequency of the generator also decreased.
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