To monitor humidity, the polymer-based humidity sensing material has become an emerging candidate because of its low-cost and low-power characteristics. To implement polymer sensing materials, however, the fabrication capability and stability are major concerns. In this work, an inkjet printable humidity sensing material, poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS), is developed to improve the fabrication capability. Besides, different kinds of nanoparticles, SiO2 and aluminum zinc oxide (AZO), are also employed to enhance the stability and sensitivity to humidity sensing. Based on experimental results, the sensitivity can be improved by 100%; the stability can also be noticeably enhanced. To understand the sensing mechanism, X-ray diffraction (XRD), Fourier transforms infrared diffraction (FTIR), and photoluminescence (PL) spectrometer measurements are performed. Based on these material investigations, the sensing enhancement is due to physical adsorption of the blending nanoparticles. This work proposes a high sensitivity and low cost humidity sensing material for different applications.
Ultra-small sensing technology has become an important research field because of the growth of sensor network technology. To accomplish the small form factor and low power consumption, heterogeneous integration of sensing elements and circuits has attracted attentions from different aspects. In this work, conductive polymer PEDOT:PSS based resistor-type sensors are fabricated on silicon dioxide substrate. Directly inkjet printing technique provides a low-cost, roomtemperature process to cast sensing films of 500nm thickness on pre-patterned Au electrodes. The Response behavior of humidity sensor operation between 20% -80% RH is experimental determined. In addition, the directly inkjet printing the developed sensing material on the top of CMOS fabricated circuit is also demonstrated. This work demonstrates the potential to integrate sensing device on the top of CMOS IC chip.
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