FePt alloy films have been electrodeposited from a bath containing stable Fe complex. The annealing in atmosphere of H2 instead of vacuum results in the improvement of the L10 FePt properties because of the reduction of Fe oxide in the as- deposited films. The electrodeposited FePt alloy was uniformly embedded into nanohole templates such as anodized alumina films and phase separated AlSi films. The L10 ordered phase is formed in the nanohole structures.
We investigated the potential of an anodic alumina template for high-density patterned media. Anodic alumina hole density of 1.86 Tdots/in 2 was achieved by suppressing surface roughness by alloying aluminum with Ti and Hf. However, it was difficult to fabricate the embedded type patterned media with a recording layer of thinner than 25 nm in an anodic alumina template of 1.03 Tdots/in 2 . This necessitated a switch from an embedding process to a coating process, so we developed a new anodizing process for patterned media of 1 Tdots/in 2 . The process formed the niobium oxide pillar structure successfully with high density in an anodic alumina template. 1.03 Tdots/in 2 patterned media fabrication was achieved by depositing the Co70Pt30 recording layer on the pillars.
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