In recent years, the application of gas sensors is becoming more and more extensive. Driven by potential applications such as the Internet of Things, its technology development direction begins with miniaturization, integration, modularization, and intelligence. However, there is a bottleneck in the research of interface circuits, which restricts the development of gas sensors in volume, power consumption, and intelligence. To solve this problem, a MEMS gas sensor interface circuit based on ADC technology is proposed in this paper. Under the condition of the Huahong 110 nm process, the working voltage is 3.3 V, the resistance change of 100 Ω~1 MΩ can be detected, the conversion error is in the range of 0.5~1%, and the maximum power consumption is 986 μW. The overall layout area is 0.49 × 0.77 mm2. Finally, the correctness of the circuit function is verified by post-layout simulation.
In this paper, a low dropout (LDO) circuit based on a curvature compensation benchmark and closed-loop stability is designed. This circuit compensates for the higher order term of VBE in a BJT through the subthreshold characteristic of MOSFET and achieves the effect of curvature compensation. The bandgap reference circuit provides a stable input voltage for the LDO circuit, while the source follower and adaptive bias circuit improve the response speed and closed-loop stability of the LDO circuit. The temperature drift coefficient of the bandgap circuit is 8.11 ppm/°C, the input voltage is 3–5 V, the output voltage is 2.8 V, and the linear adjustment rate is 0.22%.
According to the structure of the micro-gyroscope with a ball-disk rotor, the corresponding Reynolds equation is solved by using the motion equation, continuity equation, and state equation. The damping coefficients of axial vibration, radial vibration, and rotation around the Z axis are derived theoretically. The damping theoretical model of the micro-gyroscope is constructed to analyze the gas film damping and oil film damping of the ball-disk rotor in three degrees of freedom motion.
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