We report on a photonic crystal slab patterned on a 690 nm thick LiNbO3 thin film bonded to SiO2 on lithium niobate substrate. The transmission spectrum is measured and a broad and clear photonic bandgap ranging from 1335 to 1535 nm with a maximum extinction ratio of more than 20 dB is observed. The bandgap is simulated by plane wave expansion and 3D finite-difference time-domain methods. Such a deep and broad bandgap structure can be used to form high-performance photonic devices and circuits on the platform of lithium niobate-on-insulator.
We report on the formation and the optical properties of the planar and ridge optical waveguides in rutile TiO₂ crystal by He+ ion implantation combined with micro-fabrication technologies. Planar optical waveguides in TiO₂ are fabricated by high-energy (2.8 MeV) He+-ion implantation with a dose of 3 × 10¹⁶ ions/cm² and triple low energies (450, 500, 550) keV He+-ion implantation with all fluences of 2 × 10¹⁶ ions/cm² at room temperature. The guided modes were measured by a modal 2010 prism coupler at wavelength of 1539 nm. There are damage profiles in ion-implanted waveguides by Rutherford backscattering (RBS)/channeling measurements. The refractive-index profile of the 2.8 MeV He+-implanted waveguide was analyzed based on RCM (Reflected Calculation Method). Also ridge waveguides were fabricated by femtosecond laser ablation on 2.8 MeV ion implanted planar waveguide and Ar ion beam etching on the basis of triple keV ion implanted planar waveguide, separately. The loss of the ridge waveguide was estimated. The measured near-field intensity distributions of the planar and ridge modes are all shown.
The properties of the guided modes, including the single-mode conditions and the coupling of different polarized modes in the single-crystal lithium niobate photonic wires, were analyzed in detail. One-dimensional photonic crystal micro-cavities with several different patterns, which could be used as an ultra-compact optical filter, were designed and simulated in order to get high transmission at the resonant wavelength and the best preferment. The designed structure, with the whole size of 6.5 × 0.7 μm2, was fabricated on a single-mode photonic wire. A measured peak transmission of 0.34 at 1400 nm, an extinction ratio of 12.5 dB and a Q factor of 156 were obtained. The measured transmission spectrum was basically consistent with the simulation, although a slight shift of resonant wavelength occurred due to the fabrication errors.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.