Estimates of the influence of multiple scattering, straggling, and target‐surface roughness on the backscattering yield of charged particles are presented. The formulae derived for the backscattering yield, which take into account the above factors, give a satisfactory description of the spectra of protons backscattered from W and Ge targets that are measured at incident proton energies E0 of 0.3, 0.5, and 6.3 MeV. The deduced dependence of the multiple scattering contribution on the Rutherford scattering angle makes it possible to eliminate the influence of multiple scattering on the results of determination of the specific energy losses of charged particles from the backscattered spectra. Values are given of the energy losses of protons in W in the energy region 0.1 to 5.5 MeV and in Ge in the energy region 0.1 to 0.45 MeV, which are obtained from the backscattered proton spectra.
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