The vibration behavior of piezoelectric microbeams is studied on the basis of the modified couple stress theory. The governing equations of motion and boundary conditions for the Euler-Bernoulli and Timoshenko beam models are derived using Hamilton’s principle. By the exact solution of the governing equations, an expression for natural frequencies of microbeams with simply supported boundary conditions is obtained. Numerical results for both beam models are presented and the effects of piezoelectricity and length scale parameter are illustrated. It is found that the influences of piezoelectricity and size effects are more prominent when the length of microbeams decreases. A comparison between two beam models also reveals that the Euler-Bernoulli beam model tends to overestimate the natural frequencies of microbeams as compared to its Timoshenko counterpart.

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