Thin films composed of the copolymer of glycidyl methacrylate and ethyl acrylate and cobalt(II1) ammine or alkylamine salta as photoinitiators undergo crces-linking upon deep-UV irradiation and subsequent heating. The mechanism of cross-linking involves nucleophilic attack by photoliberated am(m)ine base on the epoxide ring of the copolymer. The quantum efficiency for photodecomposition of the cobalt(II1) salts is about 1% at 254 nm. Oxygen plasma etching studies suggest that the cobalt(II1) salts are dispersed uniformly as submicron particles throughout the film.

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